Deposition of CeO2/TCP Thin Film on Stainless Steel 316 L by RF sputtering

نویسندگان

چکیده

RF sputtering method was used for deposition 70wt% CeO2/TCP thin film on stainless steel 316L surface. The selection of ceria and tricalcium phosphate is according to the fact importance these materials in biomedical media. produced coating characterized by XRD, FESEM/EDS AFM analysis, result revealed that obtained peaks from XRD refer deposited materials. When substitution Ce done, distorting lattice structure can occur suggesting certain incorporation cerium oxide within TCP lattice. Also, SEM investigation uniformly homogeneous surface as a layer (CeO2 + CaO) sharp plate-like crystals. EDS analysis confirms presence Ce, Ca, O P elements, thickness determined at 130.7 nm. soaking Simulation body fluid indicated formation layers like hydroxyapatite, which investigated methods.

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ژورنال

عنوان ژورنال: Ma?allat? al-handasat? wa-al-tikn?l??iy?

سال: 2021

ISSN: ['1681-6900', '2412-0758']

DOI: https://doi.org/10.30684/etj.2021.168140